Počet záznamů: 1
Large area growth of functional and electronic-grade diamond thin films - today's reality
- 1.0399675 - FZÚ 2014 RIV SK eng C - Konferenční příspěvek (zahraniční konf.)
Kromka, Alexander - Babchenko, Oleg - Ižák, Tibor - Varga, Marián - Potocký, Štěpán - Rezek, Bohuslav
Large area growth of functional and electronic-grade diamond thin films - today's reality.
Progresívne materiály a vákuum ( Progressive materials and vacuum). Bratislava: Slovenská vakuová spolocnosť, 2012 - (Varga, M.; Veselý, M.; Vincze, A.), s. 11-14. ISBN 978-80-971179-0-0.
[School of Vacuum Technology /15./ ( Progressive materials and vacuum). Štrbské pleso (SK), 08.11.2012-11.11.2012]
Grant CEP: GA ČR(CZ) GAP108/11/0794; GA ČR GAP108/12/0910
Institucionální podpora: RVO:68378271
Klíčová slova: diamond thin films * large area deposition * linear plasma * pressure
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
Diamond thin films were deposited in the linear antenna microwave plasma system. The micro- or nano-sized character of grown crystals was controlled by total gas pressure and CO2 content in the hydrogen rich gas mixture. Both these process parameters were shown as principal factors shifting the diamond growth either into re-nucleation or to crystal-enlargement mode. Thus the detailed study on total gas pressure influence onto growth kinetics and gas chemistry is presented.
Trvalý link: http://hdl.handle.net/11104/0226900
Počet záznamů: 1