Interferometric coordinates measurement sytem for local probe microscopy nanometrology

0397860 - ÚPT 2019 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Hrabina, Jan - Lazar, Josef - Klepetek, P. - Číp, Ondřej - Čížek, Martin - Holá, Miroslava - Šerý, Mojmír
Interferometric coordinates measurement sytem for local probe microscopy nanometrology.
NANOCON 2013, 5TH INTERNATIONAL CONFERENCE. Ostrava: TANGER Ltd, 2014. ISBN 978-80-87294-47-5.
[NANOCON 2013. International Conference /5./. Brno (CZ), 16.10.2013-18.10.2013]
Grant CEP: GA ČR GPP102/11/P820; GA MPO FR-TI2/705; GA TA ČR TA01010995; GA TA ČR TA02010711; GA TA ČR TE01020233; GA MŠMT ED0017/01/01; GA MŠMT EE2.4.31.0016
Institucionální podpora: RVO:68081731
Klíčová slova: Nanometrology * Interferometry * Traceability * Local probe microscopy * Nanopositioning
Obor OECD: Optics (including laser optics and quantum optics)

We present an overview of new approaches to the design of nanometrology measuring system with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a nanopositioning setup with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro- and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.
Trvalý link: http://hdl.handle.net/11104/0225471