UV-laser treatment of nanodiamond seeds-a valuable tool for modification of nanocrystalline diamond films properties

0394528 - FZÚ 2014 RIV GB eng J - Článek v odborném periodiku
Vlček, J. - Fitl, P. - Vrňata, M. - Fekete, Ladislav - Taylor, Andrew - Fendrych, František
UV-laser treatment of nanodiamond seeds-a valuable tool for modification of nanocrystalline diamond films properties.
Journal of Physics D-Applied Physics. Roč. 46, č. 3 (2013), s. 1-7. ISSN 0022-3727. E-ISSN 1361-6463
Grant CEP: GA ČR(CZ) GAP108/11/1298; GA MŠMT(CZ) LD11076
GRANT EU: European Commission(XE) 238201 - MATCON
Institucionální podpora: RVO:68378271
Klíčová slova: Raman-spectroscopy * ablation * carbon
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
Impakt faktor: 2.521, rok: 2013

This work aimed to study the UV-laser treatment of precursor (nanodiamond seeds on silicon substrates) and its influence on the properties of grown nanocrystalline diamond (NCD) films. Pulsed Nd:YAG laser operating at the 4th harmonic frequency (laser fluence EL = 250 mJ cm-2 , pulse duration 5 ns) was used as a source, equipped with an optical system for focusing laser beam onto the sample, allowing exposure of a local spot and horizontal patterning. The variable parameters were: number of pulses (from 5 to 400) and the working atmosphere (He, Ar and O2). Ablation and/or graphitization of seeded nanodiamond particles were observed. Further the microwave plasma-enhanced CVD was employed to grow NCD films on exposed and non-exposed areas of silicon substrates. The size, shape and density distribution of laser-treated nanodiamond seeds were observed by atomic force microscopy (AFM) and their chemical composition by x-ray photoelectron spectroscopy (XPS) analysis.
Trvalý link: http://hdl.handle.net/11104/0222728