Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates

0391185 - FZÚ 2013 RIV US eng C - Konferenční příspěvek (zahraniční konf.)
Kleiner, A. - Suchaneck, G. - Adolphi, B. - Gerlach, G. - Lavrentiev, V. - Hubička, Zdeněk - Čada, Martin - Jastrabík, Lubomír - Dejneka, Alexandr
Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates.
2012 International Symposium on Applications of Ferroelectrics held jointly with 11th IEEE ECAPD and IEEE PFM (ISAF/ECAPD/PFM). New York: IEEE - Institute of Electrical and Electronics Engineers, 2012, s. 1-3. IEEE International Symposium on Applications of Ferroelecs. ISBN 978-1-4673-2669-8. ISSN 1099-4734.
[IEEE International Symposium on Applications of Ferroelectrics held jointly with 11th ECAPD and 4th PFM /21./. Aveiro (PT), 09.07.2012-13.07.2012]
Výzkumný záměr: CEZ:AV0Z10100522
Klíčová slova: PZT * thin film * polymer substrate * XPS * RBS
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

In this work, we investigate the composition profile of nanocrystalline Pb(Zr,Ti)O3 (PZT) thin films deposited by means of reactive magnetron sputtering from 200 mm diameter metallic targets (Pb, Ti, Zr). High-power pulse sputtering has been employed for alternatively the Zr- or Ti-target. Composition analysis and profiling was performed by means of X-ray photoelectron spectroscopy (XPS) and Rutherford backscattering (RBS). RBS data was recalibrated to exclude hydrogen content not determined by XPS. Advantages and drawbacks of both methods for PZT composition profiling are discussed.
Trvalý link: http://hdl.handle.net/11104/0220073