Vapor pressure, heat capacities, and phase transitions of Ti(OC.sub.4./sub.H.sub.9./sub.).sub.4./sub.), Zr(OC.sub.4./sub.H.sub.9./sub.).sub.4./sub.), and Hf(OC.sub.4./sub.H.sub.9./sub.).sub.4./sub.)

0390606 - FZÚ 2013 KR eng A - Abstrakt
Fulem, M. - Růžička, K. - Morávek, P. - Pangrác, Jiří - Hulicius, Eduard
Vapor pressure, heat capacities, and phase transitions of Ti(OC₄H₉)₄), Zr(OC₄H₉)₄), and Hf(OC₄H₉)₄).
IC-MOVPE XVI. Daejeon 302-120: Seo-Gu, 2012 - (Euijoon, Y.). s. 96-96
[nternational Conference on Metal Organic Vapor Phase Epitaxy /16./. 20. 05.- 25. 05. 2012, Busan]
Výzkumný záměr: CEZ:AV0Z10100521
Klíčová slova: vapor pressure * static method * organometallics
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

In this work, we report vapor pressures, liquid heat capacities, and phase change enthalpies and temperatures for technologically important organometallic precursors tetrakis(tert-butoxy)titanium, tetrakis(tert-butoxy)zirconium, and tetrakis(tert-butoxy)hafnium. The vapor pressures were measured using the static method in the temperature range from 273 to 333 K. The standard vaporization enthalpies were derived from the temperature dependence of vapor pressure data. The liquid heat capacities were determined by Calvet calorimetry in the temperature range from 294 to 350 K. The enthalpy and temperature of fusion were measured by differential scanning calorimetry. All the physico-chemical measurement required a specially handling and methodologies due a sensitivity of these materials to oxygen and water. The present study significantly extends and updates the information on physico-chemical properties for these materials which are needed for a proper application in the MOVPE process.
Trvalý link: http://hdl.handle.net/11104/0219466