Determination of mechanical properties from microcompression test

0387901 - ÚFM 2013 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Truhlář, Michal - Kruml, Tomáš - Kuběna, Ivo - Petráčková, Klára - Náhlík, Luboš
Determination of mechanical properties from microcompression test.
Engineering Mechanics 2012. Prague: ITAM AS CR, v. v. i., 2012 - (Náprstek, J.; Fischer, C.), s. 1435-1440. ISBN 978-80-86246-40-6.
[Engineering Mechanics 2012 /18./. Svratka (CZ), 14.05.2012-17.05.2012]
Institucionální podpora: RVO:68081723
Klíčová slova: microcompression * thin film properties * focused ion beam * Young modulus * FEM
Kód oboru RIV: JL - Únava materiálu a lomová mechanika

This paper describes a microcompression test of Al - 1.5 wt. % Cu thin film deposited on Si substrate. Microcompression combines the sample preparation with the use of ion focused beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared using FIB. The diameter of pillars was about 1.3 μm and their height was about 2 μm (equal to the film thickness). Stress-strain curves of the thin film were obtained. The results depend on crystallographic orientation of pillar. The paper is focused to an attempt to determine as precisely as possible Young modulus of the film using experimental data and finite element modelling.
Trvalý link: http://hdl.handle.net/11104/0216798