Estimation of mechanical properties of thin Al surface layer

0387893 - ÚFM 2013 RIV CZ eng K - Konferenční příspěvek (tuzemská konf.)
Petráčková, Klára - Kuběna, Ivo - Truhlář, Michal - Náhlík, Luboš - Kruml, Tomáš
Estimation of mechanical properties of thin Al surface layer.
14th International conference Applied Mechanics 2012 - Conference proceedings. Plzeň: Západočeská univerzita v Plzni, 2012 - (Lukeš, V.; Hajžman, M.; Byrtus, M.), s. 117-120. ISBN 978-80-261-0097-3.
[Applied Mechanics 2012. Plzeň (CZ), 16.04.2012-18.04.2012]
Výzkumný záměr: CEZ:AV0Z20410507
Institucionální podpora: RVO:68081723
Klíčová slova: microcompression * thin film properties * focused ion beam * FEM modelling
Kód oboru RIV: JL - Únava materiálu a lomová mechanika

The paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared in Al film using FIB. The typical diameter of pillars was about 1.3 μm and their height was about 2 μm. The results depend on crystallographic orientation of pillar. Stress-strain curves of the thin film were obtained. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.
Trvalý link: http://hdl.handle.net/11104/0216761