Calculation of difraction aberration using differential algebra

0386398 - ÚPT 2013 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Radlička, Tomáš
Calculation of difraction aberration using differential algebra.
Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2012 - (Mika, F.), s. 59-62. ISBN 978-80-87441-07-7.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./. Skalský dvůr (CZ), 25.06.2012-29.06.2012]
Institucionální podpora: RVO:68081731
Klíčová slova: Diffraction in electron optics * diferential algebra method
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

The resolution in light microscopy is limited mainly by the wave length of light. Although the wave length of the electron is several orders Of magnitude smaller than that of light, the wave properties of the electron limit the resolution of scanning electron microscopes as well. It is described by the diffraction on the limiting aperture. While the effect of the diffraction can be reduced by increasing the limiting aperture size, it affects the resolution by increased geometrical and chromatic aberrations, that are more critical in the electron optics than in the light optics. These opposite trends cause that the best resolution is given by an aperture size that balances the effect of the diffraction with the effect of geometric and chromatic aberrations - an optimal aperture.
Trvalý link: http://hdl.handle.net/11104/0215697