What is the buzz about the TZ mode

0386391 - ÚPT 2013 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Kolařík, Vladimír - Matějka, František - Matějka, Milan - Horáček, Miroslav - Urbánek, Michal - Bok, Jan - Krátký, Stanislav - Král, Stanislav - Mika, Filip
What is the buzz about the TZ mode.
Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2012 - (Mika, F.), s. 37-38. ISBN 978-80-87441-07-7.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./. Skalský dvůr (CZ), 25.06.2012-29.06.2012]
Grant CEP: GA ČR GA102/05/2325; GA MŠMT ED0017/01/01
Institucionální podpora: RVO:68081731
Klíčová slova: e-beam lithography * variable shaped electron beam
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

This contribution deals with an e-beam pattern generator BS 600 that works with a variable rectangular spot of electrons (stamp). The TZ stands for the ‘technology zoom’; its meaning is a reduction of the spot size by a factor of 3. Original description of the TZ exposure mode can be found in (1), [2] and [3]; further aspects concerning the exposure system and its electron source were described in [4] and [5]; technology and related topics are discussed in [6], [7], [8] and [9]; overview of application areas is in [10], [11] and [12]; and finally, very recent results are summarized in [13], [14] and [15].
Trvalý link: http://hdl.handle.net/11104/0215691