Measurements of current density distribution in e-beam writer

0386385 - ÚPT 2013 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Bok, Jan - Kolařík, Vladimír
Measurements of current density distribution in e-beam writer.
Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2012 - (Mika, F.), s. 7-8. ISBN 978-80-87441-07-7.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./. Skalský dvůr (CZ), 25.06.2012-29.06.2012]
Grant CEP: GA MŠMT ED0017/01/01; GA MPO FR-TI1/576
Institucionální podpora: RVO:68081731
Klíčová slova: measurement of current density * e-beam writer
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

An e-beam writer with a variable shaped beam needs a bright and stable source of electrons but also a homogeneous square beam segment. This is the starting element out oif wich smaller rectangular-shaped variable-sized patterns are selected (stamps). Current inhomogeneity of the starting element would cause and different current density of various stamps that negatively impacts the exposure quality. This problem implies the necessity of analysing and monitoring the current density distribution in the staring beam element.
Trvalý link: http://hdl.handle.net/11104/0215682