Analysis of gas flow in a secondary electron scintillation detector for ESEM with a new system of pressure limiting apertures

0385262 - ÚPT 2013 RIV CZ eng J - Článek v odborném periodiku
Maxa, J. - Neděla, Vilém - Jirák, J. - Vyroubal, P. - Hladká, K.
Analysis of gas flow in a secondary electron scintillation detector for ESEM with a new system of pressure limiting apertures.
Advances in Military Technology. Roč. 7, č. 2 (2012), s. 39-44. ISSN 1802-2308
Institucionální podpora: RVO:68081731
Klíčová slova: ESEM, * SEs Scintillation Detector * CFD * CAE * SolidWorks * Ansys
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

Environmental scanning electron microscopes offer wide possibilities for the exploration of various types of specimens, especially non-conductive and wet specimens containing different material phases. In this article the results of gas-pumping simulations are analyzed for the novel design of pressure limiting apertures in a secondary electron scintillation detector with usage of SolidWorks and Ansys systems.
Trvalý link: http://hdl.handle.net/11104/0214577