Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers

0385048 - FZÚ 2013 RIV GB eng J - Článek v odborném periodiku
Kulha, P. - Babchenko, Oleg - Kromka, Alexander - Husák, M. - Haenen, K.
Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers.
Vacuum. Roč. 86, č. 6 (2012), s. 689-692. ISSN 0042-207X. E-ISSN 1879-2715
Grant CEP: GA AV ČR KAN400100701; GA AV ČR(CZ) IAAX00100902
Výzkumný záměr: CEZ:AV0Z10100521
Klíčová slova: piezoresistive coefficients * piezoresistivity * nanocrystalline diamond * FEM
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
Impakt faktor: 1.530, rok: 2012

The paper reports on design, fabrication and characterization of piezoresistive sensors based on boron doped nanocrystalline diamond (NCD) layers. The piezoresistive sensing boron doped diamond thin films were realized on SiO2/Si3N4/Si substrates by microwave plasma enhanced chemical vapor deposition (CVD) and the piezoresistive structures were formed by reactive ion etching. The highest gauge factor at higher temperatures (GF = 7.2 at 250 °C) was observed for moderate doping level (boron to carbon ratio of 3000 ppm). One of the aims was the extraction of piezoresistive coefficients of fabricated diamond layers for utilization in a finite element piezoresistive solver.
Trvalý link: http://hdl.handle.net/11104/0214451