Dynamic study of dual high-power impulse magnetron sputtering discharge by optical emission imaging

0373838 - FZÚ 2012 RIV US eng J - Článek v odborném periodiku
Straňák, V. - Bogdanowicz, R. - Drache, S. - Čada, Martin - Hubička, Zdeněk - Hippler, R.
Dynamic study of dual high-power impulse magnetron sputtering discharge by optical emission imaging.
IEEE Transactions on Plasma Science. Roč. 39, č. 11 (2011), 2454-2455. ISSN 0093-3813. E-ISSN 1939-9375
Grant CEP: GA AV ČR KAN301370701; GA ČR GP202/09/P159; GA ČR GA202/09/0800
Grant ostatní: AVČR(CZ) M100100915
Výzkumný záměr: CEZ:AV0Z10100522
Klíčová slova: magnetic confinement * plasma properties * plasma sources
Kód oboru RIV: BH - Optika, masery a lasery
Impakt faktor: 1.174, rok: 2011

Fast optical emission imaging was employed for dynamic study of dual-high-power impulse magnetron sputtering discharge. The sputtering sources were equipped with reversed polarity of magnets, i.e., so-called closed magnetic field between magnetrons. Plasma is confined in closed magnetic field between targets alternately employed as cathode/anode. This type of magnetic confinement affects the transport of electrons and also the ionization processes of neutral particles present in the plasma, as will be shown in this paper.
Trvalý link: http://hdl.handle.net/11104/0206898