Nano-structuring of solid surface by EUV Ar8+ laser(5th International Conference on the Frontiers of Plasma Physics and Technology)

0370665 - ÚFP 2012 SG eng O - Ostatní výsledky
Koláček, Karel - Prukner, Václav - Schmidt, Jiří - Frolov, Oleksandr - Štraus, Jaroslav - Shukurov, A. - Sobota, Jaroslav - Fořt, Tomáš
Nano-structuring of solid surface by EUV Ar8+ laser(5th International Conference on the Frontiers of Plasma Physics and Technology).
2011
Grant CEP: GA MŠMT LA08024; GA MŠMT(CZ) LC528; GA AV ČR KAN300100702
Výzkumný záměr: CEZ:AV0Z20430508; CEZ:AV0Z20650511
Klíčová slova: nanopatterning by EUV laser * Ar8+ laser
Kód oboru RIV: BL - Fyzika plazmatu a výboje v plynech

Předneseno na: 5th International Conference on the Frontiers of Plasma Physics and Technology,Singapore, 18-22.04.2011,str.42-43; Ar8+ ion laser beam focused by long-focal spherical multilayer ScSi mirror ablates PMMA. In some cases on the bottom of ablated crater a laser-induced periodic surface structure (LIPSS) with period ~2,8 m is revealed. The exposition through much smaller quadratic hole (7,5x7,5 m) in mask standing in contact with PMMA ablates 2D diffraction pattern with period down to ~125 nm.
Trvalý link: http://hdl.handle.net/11104/0204393