INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC

0368755 - ÚJF 2012 RO eng C - Konferenční příspěvek (zahraniční konf.)
Muresan, M. - Zajíčková, L. - Buršíková, V. - Franta, D. - Nečas, D. - Peřina, Vratislav - Mikšová, Romana
INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC.
12th International Balkan Workshop on Applied Physics. Constanta: Ovidius University of Constanta, 2011, s. 4299-4308.
[12th International Balkan Workshop on Applied Physics. Constnta (RO), 06.07.2011-08.07.2011]
Grant CEP: GA ČR GA104/09/1269
Výzkumný záměr: CEZ:AV0Z10480505
Klíčová slova: Diamond-like carbon * Amorphous hydrogenated carbon * Optical properties
Kód oboru RIV: BL - Fyzika plazmatu a výboje v plynech

Interesting properties of diamond-like carbon (DLC) coatings such as high hardness, low friction coefficient, high thermal conductivity and wide band gaps have increased the number of industrial partners to research ways of producing DLC layers with chemical inertness, high gas barrier properties and high biocompatibility. The aim of the experiments was to characterize and compare the properties of diamond-like carbon films prepared from different mixtures such as CH4/H2, CH4/H2/N2 and CH4/Ar from a radiofrequency capacitively-coupled discharge at 13.56 MHz. Parameters like concentration, pressure, power and time were changed to vary film properties. The films were optically characterized by UV-VIS reflectometry, ellipsometry.
Trvalý link: http://hdl.handle.net/11104/0006722