Laser processing of Zinc phthalocyanine thin films prepared by low temperature evaporation

0364266 - FZÚ 2012 FR eng A - Abstrakt
Fitl, Přemysl - Myslík, V. - Náhlík, J. - Kašpárková, I. - Kopecký, D. - Vrňata, M. - Lančok, Ján - Vysloužil, F.
Laser processing of Zinc phthalocyanine thin films prepared by low temperature evaporation.
E-MRS 2010 Spring R: Laser processing and diagnostics for micro and nano applications. Strasbourg: EMRS, 2010. 13 RPIII21.
[E-MRS 2010 Spring: Laser processing and diagnostics for micro and nano applications. 07.06.2010-11.06.2010, Strasbourg]
Výzkumný záměr: CEZ:AV0Z10100522
Klíčová slova: Zinc phthalocyanine * gas sensors * thin films
Kód oboru RIV: BH - Optika, masery a lasery

Zinc phthalocyanine is a substance widely used in form of thin film for novel organic photovoltaic devices, organic light emitting diodes and gas sensors. Resistivity and contact resistivity are very important parameters of thin films in these devices. One of the possible ways to change these properties is laser treatment of films and contacts at suitable laser wavelength and energy fluences. Thin layers of Zinc phthalocyanine are prepared by low temperature evaporation in high vacuum chamber (working pressure 10-4 Pa, deposition rate ~ 1nm/min, substrate temperature 20°C). For laser treatment we use micro CNC machine equipped with semiconductor laser at wavelength 405 nm and focusing optics. With this equipment we can achieve laser processing of areas in dimensions of tenth of microns. Glass samples with nonsymmetrical three stripe metal structure we use for investigation. Contact metal structure is prepared by DC magnetron sputtering
Trvalý link: http://hdl.handle.net/11104/0199791