Study of diamond film nucleation by ultrasonic seeding in different solutions

0359679 - FZÚ 2012 SK eng A - Abstrakt
Varga, M. - Ižák, Tibor - Kromka, Alexander - Veselý, M. - Hruška, Karel - Michalka, M.
Study of diamond film nucleation by ultrasonic seeding in different solutions.
Extended Abstract Book of 7th Conference Solid State Surfaces and Interfaces. Bratislava: Comenius University, 2010 - (Brunner, R.). s. 61. ISBN 978-80-223-2938-5.
[Solid State Surfaces and Interfaces /7./. 22.11.2010-25.11.2010, Smolenice]
Výzkumný záměr: CEZ:AV0Z10100521
Klíčová slova: diamond * ultrasonic seeding * nucleation * SEM
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

In this study we have investigated the nucleation of polycrystalline diamond thin films by ultrasonic seeding on Si and SiO2 substrates. During nucleation the clean substrates were moved into ultrasonic bath and seeded by a nanodiamond powder (≤10 nm) diluted in isopropyl alcohol or deionized water containing micro-or nanosized metal powder (nickel, cobalt and yttrium). The influence of different solutions on nucleation efficiency was investigated (i.e. nucleation density, distribution, homogeneity, etc.). For highlighting the nucleation centres and better evaluation of the nucleation process the nucleated samples were moved into microwave plasma enhanced chemical vapour deposition (MW CVD) reactor and short-time (10 min) diamond deposition was performed. The nucleation efficiency was characterized by Scanning Electron Microscopy (SEM) and the chemical composition of the grown diamond layer was investigated by Raman Spectroscopy.
Trvalý link: http://hdl.handle.net/11104/0006446