Very low energy scanning electron microscopy

0352430 - ÚPT 2011 SG eng A - Abstrakt
Frank, Luděk - Radlička, Tomáš - Konvalina, Ivo - Müllerová, Ilona
Very low energy scanning electron microscopy.
Eighth International Conference on Charged Particle Optics CPO-8. Singapore: National University of Singapore, 2010. s. 98-99.
[CPO /8./ International Conference on Charged Particle Optics. 12.07.2010-16.07.2010, Singapore]
Grant CEP: GA MŠMT OE08012
Výzkumný záměr: CEZ:AV0Z20650511
Klíčová slova: very low energy scanning electron microscopy * cathode lens * BSE detector
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

Since beginning of the 1990’s the scanning electron microscopes (SEM) offer acceptable performance at impact energies of electrons below 1 keV. The key was the primary beam energy varying along the illumination column. In order to get intensive and well formed beam, high extraction voltage in the gun is necessary while minimizing the main aberration coefficients and the impact of spurious fields requires retarding the beam to a low landing energy just in front of the sample using some immersion electrostatic lens. This lens can be combined with a magnetic objective lens, leaving the sample in only weak electrostatic field, or the cathode lens principle may be used with the sample biased to a high negative potential.
Trvalý link: http://hdl.handle.net/11104/0191937