Počet záznamů: 1
Spatial coherence profilometry on tilted surfaces
- 1.0340740 - FZÚ 2010 RIV US eng J - Článek v odborném periodiku
Pavlíček, Pavel - Halouzka, M. - Duan, Z. - Takeda, M.
Spatial coherence profilometry on tilted surfaces.
Applied Optics. Roč. 48, č. 34 (2009), H40-H47. ISSN 0003-6935
Grant CEP: GA MŠMT(CZ) 1M06002
Výzkumný záměr: CEZ:AV0Z10100522
Klíčová slova: tilted surface * spatial coherence profilometry * spatial coherence * measurement error * shape measurement
Kód oboru RIV: BH - Optika, masery a lasery
Impakt faktor: 1.410, rok: 2009
The influence of tilted surfaces on the measurement of shape by spatial coherence profilometry is investigated. Based on theoretical analysis and experimental results, the systematic measurement error caused by surface tilt is determined. The theoretical analysis and the experiments show the similarities and differences between spatial coherence profilometry and white-light interferometry.
Trvalý link: http://hdl.handle.net/11104/0183922
Počet záznamů: 1