Počet záznamů: 1
Specimen Charging and Detection of Signal from Non-conductors in a Cathode Lens-Equipped Scanning Electron Microscope
- 1.0205670 - UPT-D 20030052 RIV US eng J - Journal Article
Zobačová, Jitka - Frank, Luděk
Specimen Charging and Detection of Signal from Non-conductors in a Cathode Lens-Equipped Scanning Electron Microscope.
Scanning. Roč. 25, č. 3 (2003), s. 150 - 156. ISSN 0161-0457. E-ISSN 1932-8745
R&D Projects: GA AV ČR IBS2065017
Institutional research plan: CEZ:AV0Z2065902
Keywords : nonconductive specimens * specimen charging * cathode lens
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 0.733, year: 2003
This paper concerns the problems connected with the observation of a nonconductive specimen in a scanning electron microscope (SEM) when incident electrons create a surface change and a corresponding electric field. The special configuration of the cathode lens enables one to control the landing energy of primary electrons via the specimen bias. In the cathode lens, the accelerating electric field at the surface of the specimen combines itself with that of the surface in influencing the trajectories of the signal electrons and hence the detected signal level and the possible recapturing of slow secondaries. Recaptured electrons reduce the ultimate positive surface potential, which arises when working below the higher critical energy of electron impact. Computer simulations of electron trajectories were performed for the typical cathode lens configuration and for a model specimen characterized by emission yields similar to those for glass. The simulations brought an extensive set of data about the trajectories of both secondary and backscattered electrons.
Permanent Link: http://hdl.handle.net/11104/0101283
Počet záznamů: 1