Adaptation of scanning electron microscope to environmental scanning electron microscope

0205664 - UPT-D 20030046 RIV CZ eng K - Konferenční příspěvek (tuzemská konf.)
Neděla, Vilém
Adaptation of scanning electron microscope to environmental scanning electron microscope.
Proceedings of the 9th Conference and Competition Student EEICT 2003 - Papers written by postgraduate students. Brno: Brno University of Technology, 2003 - (Řezáč, D.; Zacios, D.), s. 495 - 498. ISBN 80-214-2379-X.
[STUDENT EEICT 2003. Brno (CZ), 24.04.2003]
Grant CEP: GA ČR GA102/01/1271; GA AV ČR IBS2065107
Výzkumný záměr: CEZ:AV0Z2065902
Klíčová slova: scanning electron microscope * differential pumping chamber * detector
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

This paper deals with adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). It focuses especially to the construction and assembly of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts in the environmental scanning electron microscope.
Trvalý link: http://hdl.handle.net/11104/0101277