Detection of backscattered electrons in environmental scanning electron microscope

0205650 - UPT-D 20030032 RIV HR eng C - Konferenční příspěvek (zahraniční konf.)
Autrata, Rudolf - Jirák, Josef - Wandrol, Petr - Špinka, Jiří
Detection of backscattered electrons in environmental scanning electron microscope.
Proceedings of the 6th Multinational Congress on Microscopy - European Extension. Zagreb: Croatian Society for Electron Microscopy, 2003 - (Milat, O.; Ježek, D.), s. 489 - 490
[MCEM. Pula (HR), 01.06.2003-05.06.2003]
Grant CEP: GA ČR GA102/01/1271
Výzkumný záměr: CEZ:AV0Z2065902
Klíčová slova: collection angle * signal level * detector
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

Impact of primary electrons causes generation of signals in the environmental scanning electron microscope (ESEM). These signals can be subsequently detected. Secondary and backscattered electrons are very often used to obtain information about the specimen. In ESEM secondary electrons are mostly detected by a ionisation detector, while backscattered electrons are detected by a scintillation detector.
Trvalý link: http://hdl.handle.net/11104/0101263