New Multichannel Electron Energy Analyzer with Cylindrically Symmetrical Electrostatic Field

0205639 - UPT-D 20030021 RIV US eng J - Článek v odborném periodiku
Čižmár, Petr - Müllerová, Ilona
New Multichannel Electron Energy Analyzer with Cylindrically Symmetrical Electrostatic Field.
Microscopy and Microanalysis. Roč. 9, Sup. 3 (2003), s. 18 - 19. ISSN 1431-9276. E-ISSN 1435-8115.
[MC 2003. Dresden, 07.09.2003-12.09.2003]
Grant CEP: GA AV ČR IAA1065304
Výzkumný záměr: CEZ:AV0Z2065902
Klíčová slova: Auger spectroscopy * surface examination * scanning electron microscope
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
Impakt faktor: 1.648, rok: 2003

Auger electron and photoelectron spectroscopies are important methods for surface examination. The useful signal is low, so the time of measurement is critical, particularly in spectro-microscopic applications and with rad iation sensitive specimens. Hence, the parallel acquisition of energy spectra with a multichannel analyzer is highly desirable. One successful solution is the hyperbolic field analyzer [1]. Further improvement can be achieved by incorporating the cylindrical symmetry [2] (see FIG 1). In this case the input pupil is imaged into a series of point images.
Trvalý link: http://hdl.handle.net/11104/0101252