High resolution field emission scanning electron microscope JSM 6700 in ISI AS CR Brno - first experience and results with the instrument operation

0205610 - UPT-D 20020088 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Matějková, Jiřina - Rek, Antonín
High resolution field emission scanning electron microscope JSM 6700 in ISI AS CR Brno - first experience and results with the instrument operation.
International summer school: Role of physics in future applications: from nanotechnology to macroelectronics. Tři Studně: VUT, 2002, s. -.
[Role of physics in future applications: from nanotechnology to macroelectronics. Tři Studně (CZ), 10.06.2002-15.06.2002]
Výzkumný záměr: CEZ:AV0Z2065902
Klíčová slova: nano technology * high resolution FE SEM
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

JSM6700F is an ultra high resolution FE SEM suitable for observation of fine structures such as mutilayeres film and nano particles fabricated by the nanotechnology. This JEOL microscope is at ISI ASCR Brno in experimental operation since the beginning of 2002. Its possibilities have been tested on first specimens with submicron structures.
Trvalý link: http://hdl.handle.net/11104/0101223