Examination of nanostructured multilayers by the scanning low energy microscopy

0205302 - UPT-D 20000081 RIV DE eng C - Konferenční příspěvek (zahraniční konf.)
Zobačová, Jitka - Müllerová, Ilona - Frank, Luděk - Srnánek, R. - Kováč, J. - Barna, A.
Examination of nanostructured multilayers by the scanning low energy microscopy.
Proceedings of Autumn School 2000 on Material Science nad Electron Microscopy. Berlin: Fritz Haber Institut, 2000 - (Su, D.; Wrabetz, S.), s. 45-46
[Material Science nad Electron Microscopy - Autumn School 2000. Berlin (DE), 10.10.2000-15.10.2000]
Výzkumný záměr: CEZ:AV0Z2065902
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

Requirements of the technology and production check in the nanometer range implicate the necessity of developing methods to examine the important parameters of the structure. Although more experiments are necessary to explain the observations, the SLEEM mode seems to be powerful tool in this field.
Trvalý link: http://hdl.handle.net/11104/0100917