0205237 - UPT-D 20000013 RIV CZ eng C - Conference Paper (international conference)
Hutař, Otakar - Oral, Martin - Müllerová, Ilona - Romanovský, Vladimír
Application of low-energy backscattered electron detection in the inspection of semiconductor devices technology.
Proceedings of the 12th European Congress on Electron Microscopy. Vol. 3. Brno: Czechoslovak Society for Electron Microscopy, 2000 - (Frank, L.; Ciampor, F.), s. I201-I202. ISBN 80-238-5503-4.
[EUREM /12./ - European Congress on Electron Microscopy. Brno (CZ), 09.07.2000-14.07.2000]
R&D Projects: GA AV ČR IBS2065017
Institutional research plan: CEZ:AV0Z2065902
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0100855