Characterisation of hydrogen and erbium in carbon layers fabricated by PACVD for optical applications

0185527 - UJF-V 20020029 RIV NL eng J - Článek v odborném periodiku
Macková, Anna - Peřina, Vratislav - Hnatowicz, Vladimír - Nekvindová, P. - Prajzler, V. - Huttel, I. - Špirková, J.
Characterisation of hydrogen and erbium in carbon layers fabricated by PACVD for optical applications.
Nuclear Instruments & Methods in Physics Research Section B. Roč. 188, - (2002), s. 112-114. ISSN 0168-583X. E-ISSN 1872-9584
Grant CEP: GA ČR GA102/00/0895; GA AV ČR KSK1010104
Klíčová slova: carbon layers * Rutherford backscattering spectrometry * elastic recoil detection analysis * active waveguides
Kód oboru RIV: BG - Jaderná, atomová a mol. fyzika, urychlovače
Impakt faktor: 1.158, rok: 2002

Carbon films prepared by plasma assisted chemical vapor deposition were doped by laser active ion Er3+. The characterisation of the layers was performed using Rutherford back scattering spectrometry and elastic recoil detection analysis. Optical properties of the waveguides were measured at 660 run wave lenght using standard prism spectroscopy. The correlation between the layer composition and the content of incorporated erbium and layer optical properties shows very interesting aspects.
Trvalý link: http://hdl.handle.net/11104/0081921