Počet záznamů: 1
Preparation of high energy IBAD SiN, thin films and resulting nitrogen concentration profiles measured by RBS method
- 1.0184825 - UJF-V 990237 CN eng A - Abstrakt
Černý, F. - Hnatowicz, Vladimír
Preparation of high energy IBAD SiN, thin films and resulting nitrogen concentration profiles measured by RBS method.
Book of Abstracts of the International Conference on Surface Modification of Metals by Ion Beams /11./. Beijing: China Institute of Atomic Energy, 1999. s. 104.
[International Conference on Surface Modification of Metals by Ion Beams /11./. 19.09.1999-24.09.1999, Beijing]
Kód oboru RIV: BG - Jaderná, atomová a mol. fyzika, urychlovače
Trvalý link: http://hdl.handle.net/11104/0081250
Počet záznamů: 1