Počet záznamů: 1
Raman bands in microwave plasma assisted chemical vapour deposited films
- 1.0178058 - UFM-A 20033076 RIV NL eng J - Článek v odborném periodiku
Kadlečíková, M. - Breza, J. - Veselý, M. - Frgala, Z. - Kudrle, V. - Janča, J. - Janík, J. - Buršík, Jiří
Raman bands in microwave plasma assisted chemical vapour deposited films.
Microelectronics Journal. Roč. 34, č. 11 (2003), s. 1075-1077. ISSN 0026-2692. E-ISSN 1879-2391
Grant CEP: GA AV ČR IBS2041105; GA MŠMT OC 527.20
Výzkumný záměr: CEZ:AV0Z2041904
Klíčová slova: chemical vapour deposition * diamond * Raman spectroscopy
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
Impakt faktor: 0.565, rok: 2003
Raman spectroscopy is employed to characterize thin diamond films deposited by microwave plasma assisted chemical vapour deposition technique using a gas mixture of methane and hydrogen. The surface morphology was analyzed by scanning electron microscopy.The submicron crystals on (100) facets of diamond crystals gave rise to bands in the Raman spectrum.
Trvalý link: http://hdl.handle.net/11104/0074952
Počet záznamů: 1