Thermal stability of microhardness and internal stress of hard a-C films with predominantly sp 2 bonds

0134345 - FZU-D 20030243 RIV CH eng J - Článek v odborném periodiku
Kulykovskyy, Valeriy - Vorlíček, Vladimír - Boháč, Petr - Kurdyumov, A. - Deineka, Alexander - Jastrabík, Lubomír
Thermal stability of microhardness and internal stress of hard a-C films with predominantly sp 2 bonds.
Diamond and Related Materials. Roč. 12, - (2003), s. 1378-1384. ISSN 0925-9635. E-ISSN 1879-0062
Grant CEP: GA MŠMT LN00A015; GA ČR GA202/02/0216
Výzkumný záměr: CEZ:AV0Z1010914
Klíčová slova: diamond-like carbon * sputtering * mechanical properties
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
Impakt faktor: 1.867, rok: 2003

Annealing in vacuum at temperatures up to 820 o C, microhardness, internal stress, electron diffraction, Raman and optical spectra of three sets of films with different initial microhardness were compared. Both the high internal stress and the specific film nanostricture are responsible for the high microhardness of these sp 2 -bonded films.
Trvalý link: http://hdl.handle.net/11104/0032250