Ellipsometric investigations of the refractive index depth profile in PZT thin films

0133592 - FZU-D 20010392 RIV DE eng J - Článek v odborném periodiku
Deineka, Alexander - Jastrabík, Lubomír - Suchaneck, G. - Gerlach, G.
Ellipsometric investigations of the refractive index depth profile in PZT thin films.
Physica Status Solidi A. Roč. 188, č. 4 (2001), s. 1549-1552. ISSN 0031-8965
Grant CEP: GA MŠMT LN00A015; GA ČR GA202/00/1425
Výzkumný záměr: CEZ:AV0Z1010914
Klíčová slova: PZT films * optical investigations
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
Impakt faktor: 1.025, rok: 2001

Optical investigations of self-polarized PbZr_0.235Ti0.765O_{3 films deposited onto Si/SiO}2/adhesion layer/(111) Pt substrate by RF sputtering are presented in this work. Measurements were performed with a spectral ellipsometer working in rotating analyzer mode.
Trvalý link: http://hdl.handle.net/11104/0031555