0133476 - FZU-D 20010328 RIV US eng C - Conference Paper (international conference)
Jelínek, Miroslav
Problems of PLD hybrid technique for CN_x films creation.
0-8197-4120-1. In: Laser Physics and Applications. Bellingham: SPIE, 2001 - (Atanasov, P.; Cartaleva, S.), s. 285-289. Proceedings of SPIE., 4397. ISSN 0277-786X.
[International School on Quantum Electronics /11./. Varna (BG), 18.09.2000-22.09.2000]
Institutional research plan: CEZ:AV0Z1010914
Keywords : hybrid deposition * carbon nitride * radiofrequency discharge * hollow cathode discharge
Subject RIV: BM - Solid Matter Physics ; Magnetism

Highly nitrogenated CN_{x films were created by pulsed laser deposition, combidned with radiogrequency and hallow cathode dicharges. The FR discharge was held between two electrodes situated parallel to plasm plume from a graphite target. In PLD combined with HC discharges an one of the RF electrodes was used to supply nitrogen on the substrate.
Permanent Link: http://hdl.handle.net/11104/0031441}