Study of RF discharge properties for hybrid pulsed laser deposition

0133469 - FZU-D 20010321 RIV CZ eng K - Konferenční příspěvek (tuzemská konf.)
Novotný, M. - Jelínek, Miroslav - Bulíř, Jiří - Zelinger, Zdeněk - Lančok, Ján
Study of RF discharge properties for hybrid pulsed laser deposition.
Proceedings of Workshop 2001. Vol. A. Praha: Czech Technical University, 2001, s. 114-115. CTU reports., 5.
[Workshop 2001. Praha (CZ), 00.02.2001]
Grant CEP: GA AV ČR IAA1010110; GA MŠMT LN00A015
Výzkumný záměr: CEZ:AV0Z1010914
Klíčová slova: CN₂ * pulsed laser deposition * activation of nitrogen
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

We have created CN_{x layers by pulsed laser deposition (PLD) using graphite target in N}2 ambient and KrF excimer laser. We have found that active nitrogen plays an important role in this task. We have studied the influence of various RF parameters on the activation of nitrogen by optical emission spectroscopy.
Trvalý link: http://hdl.handle.net/11104/0031434