Polarization profile of RF-sputtered self-polarized PZT thin films

0133318 - FZU-D 20010113 RIV GB eng J - Článek v odborném periodiku
Suchaneck, G. - Koehler, R. - Sandner, T. - Gerlach, G. - Deineka, Alexander - Jastrabík, Lubomír - Kosarev, A. I. - Andronov, A. N.
Polarization profile of RF-sputtered self-polarized PZT thin films.
Integrated Ferroelectrics. Roč. 32, - (2001), s. 861-869. ISSN 1058-4587. E-ISSN 1607-8489
Grant CEP: GA ČR GA202/00/1425
Výzkumný záměr: CEZ:A02/98:Z1-010-914
Klíčová slova: self-polarization * electrode interaction * interface layer
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
Impakt faktor: 0.512, rok: 2001

In this work, the laser-intensity-modulation method is applied for investigation of self-polarized sputtered Pb(Ti_1-xZr_x)O₃ thin films. By means of spectroscopic ellipsometry the depth profile of refractive index was obtained. C-V measurements on samples of various thickness were performed to determine the interface capacitance and the space charge density.
Trvalý link: http://hdl.handle.net/11104/0031296