0132087 - FZU-D 980341 RIV US eng J - Článek v odborném periodiku
Mišina, Martin - Setsuhara, Y. - Miyake, S.
Electron cyclotron resonance plasma enhanced direct current sputtering discharge with magnetic-mirror plasma confinement.
Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films. Roč. 15, č. 4 (1997), s. 1922-1928. ISSN 0734-2101. E-ISSN 1520-8559
Impakt faktor: 1.576, rok: 1997
Trvalý link: http://hdl.handle.net/11104/0030125