Study of thin TiC.sub.x./sub.N.sub.1-x./sub. films fabricated by hybrid magnetron-laser deposition

0041223 - FZÚ 2007 RIV US eng C - Konferenční příspěvek (zahraniční konf.)
Kocourek, Tomáš - Jelínek, Miroslav - Studnička, Václav - Kadlec, J.
Study of thin TiC_xN_1-x films fabricated by hybrid magnetron-laser deposition.
[Studie tenkých TiC_xN_1-x vrstev vyrobených hybridní magnetron-laserovou depozicí.]
Proceeding of SPIE - Int. Connference on Lasers, Applications, and Technologies 2005. Laser-Assisted Micro- and Nanotechnologies. Bellingham: SPIE, 2005 - (Tománek, P.; Hrabovský, M.; Miler, M.; Senderáková, D.), 61800G/1-61800G/5. Proceedings of SPIE, 6180. ISBN 0-8194-6213-6. ISSN 0277-786X.
[Photonics, Devices, and Systems III. Prague (CZ), 08.06.2005-11.06.2005]
Grant CEP: GA AV ČR(CZ) IAA1010110
Výzkumný záměr: CEZ:AV0Z10100522
Klíčová slova: laser deposition * magnetron * radiofrequency discharge * TiCN * thin films
Kód oboru RIV: BH - Optika, masery a lasery

Titanium-carbonitride thin films were grown at room temperature using a hybrid deposition arrangement combining DC magnetron sputtering and KrF pulsed laser deposition (MSPLD). Carbon and titanium were simultaneously deposited an the same Si substrate dimensions of 3 x 3 cm. Films were fabricated in argon-nitrogen atmosphere of 1 Pa - 5 Pa, for laser fluence of Jcm^-2 and magnetron power of 150 W. Film properties were modified by RF discharge held between the target and substrate. Film crystallinity was studied by XRD and the composition depth profile of TiCN layers by glow discharge optical emission spectroscopy (GDOES).

Titan-karbonitridové tenké vrstvy byly deponovány při pokojové teplotě hybridní depozicí kombinující DC magnetron a KrF laserovou depozici. Bylo deponováno v dusíkové atmosféře 1 Pa - 5 Pa, hustota laserové energie 15 Jcm^-2 a výkon magnetronu 150 W. Bylo studováno složení vrstvy a XRD.
Trvalý link: http://hdl.handle.net/11104/0134763