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IR Laser CVD OF Nanodisperse Ge-Si-Sn Alloys Obtained by Dielectric Breakdown of GeH4/SiH4/SnH4 Mixtures

SYSNO	0447032
Title	IR Laser CVD OF Nanodisperse Ge-Si-Sn Alloys Obtained by Dielectric Breakdown of GeH4/SiH4/SnH4 Mixtures
Author(s)	Křenek, Tomáš (UCHP-M) Bezdička, Petr (UACH-T) [ALMA]_{SAI, RID, ORCID} Murafa, Nataliya (UACH-T) [CIT]_{RID, SAI} Šubrt, Jan (UACH-T) [CIT]_{SAI, RID} Pola, Josef (UCHP-M)_{RID, ORCID, SAI}
Source Title	NANOCON 2014, 6th International Conference. S. 268-273. - Ostrava : Tanger Ltd, 2015
ISBN	978-80-87294-53-6
Conference	NANOCON International Conference /6./, 05.11.2014-07.11.2014, Brno
Document Type	Konferenční příspěvek (zahraniční konf.)
Institutional support	UCHP-M - RVO:67985858 ; UACH-T - RVO:61388980
Language	eng
Country	CZ
Keywords	IR laser * thermal decomposition * Ge/Si/Sn nanoalloys
Permanent Link	http://hdl.handle.net/11104/0248982

Number of the records: 1