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Collection of secondary electrons in scanning electron microscopes

SYSNO ASEP	0333617
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Collection of secondary electrons in scanning electron microscopes
Author(s)	Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID} Konvalina, Ivo (UPT-D)_{RID, ORCID, SAI}
Number of authors	2
Source Title	Journal of Microscopy. - : Wiley - ISSN 0022-2720 Roč. 236, č. 3 (2009), s. 203-210
Number of pages	8 s.
Language	eng - English
Country	GB - United Kingdom
Keywords	detection of electrons ; magnetic lenses ; secondary electrons ; SEM
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects	OE08012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	IAA100650803 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
UT WOS	000271974200006
DOI	10.1111/j.1365-2818.2009.03189.x
Annotation	Collection of the secondary electrons in the scanning electron microscope was simulated and the results have been experimentally verified for two types of the objective lens and three detection systems. The aberration coefficients of both objective lenses as well as maximum axial magnetic fields in the specimen region are presented. Compared are a standard side-attached secondary electron detector, in which only weak electrostatic and nearly no magnetic field influence the signal trajectories in the specimen vicinity, and the side-attached (lower) and upper detectors in an immersion system with weak electrostatic but strong magnetic field penetrating towards the specimen. The collection efficiency was calculated for all three detection systems and several working distances. The ability of detectors to attract secondary electron trajectories for various initial azimuthal and polar angles was calculated, too.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2010

Number of the records: 1