Collection of secondary electrons in scanning electron microscopes

0333617 - ÚPT 2010 RIV GB eng J - Journal Article
Müllerová, Ilona - Konvalina, Ivo
Collection of secondary electrons in scanning electron microscopes.
Journal of Microscopy. Roč. 236, č. 3 (2009), s. 203-210. ISSN 0022-2720. E-ISSN 1365-2818
R&D Projects: GA MŠMT OE08012; GA AV ČR IAA100650803
Institutional research plan: CEZ:AV0Z20650511
Keywords : detection of electrons * magnetic lenses * secondary electrons * SEM
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 1.612, year: 2009

Collection of the secondary electrons in the scanning electron microscope was simulated and the results have been experimentally verified for two types of the objective lens and three detection systems. The aberration coefficients of both objective lenses as well as maximum axial magnetic fields in the specimen region are presented. Compared are a standard side-attached secondary electron detector, in which only weak electrostatic and nearly no magnetic field influence the signal trajectories in the specimen vicinity, and the side-attached (lower) and upper detectors in an immersion system with weak electrostatic but strong magnetic field penetrating towards the specimen. The collection efficiency was calculated for all three detection systems and several working distances. The ability of detectors to attract secondary electron trajectories for various initial azimuthal and polar angles was calculated, too.
Permanent Link: http://hdl.handle.net/11104/0178559