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Fabrication of functional nanostructures in thin silicon nitride membranes
- 1.MATĚJKA, M., CHLUMSKÁ, J., KRÁTKÝ, S., ŘIHÁČEK, T., KNÁPEK, A., KOLAŘÍK, V. Fabrication of functional nanostructures in thin silicon nitride membranes. In: Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
Number of the records: 1