Recent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments

Number of the records: 1

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SYSNO	0559035
Title	Recent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments
Author(s)	Zehetner, J. (AT) Vanko, G. (SK) Dohnal, F. (AT) Izsák, T. (SK) Držík, M. (SK) Kromka, Alexander (FZU-D)_{RID, ORCID, SAI}
Source Title	Proceedings of ADEPT - ADEPT 2022. S. 7-12. - Žilina : University of Žilina, 2022 / Feiler M. ; Ziman M. ; Kováčová S. ; Kováč, jr. J.
Conference	10th International Conference on Advances in Electronic and Photonic Technologies - ADEPT 2022, 20.06.2022 - 24.06.2022, Tatranská Lomnica
Document Type	Konferenční příspěvek (zahraniční konf.)
Grant	8X20035 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
Institutional support	FZU-D - RVO:68378271
Language	eng
Country	SK
Keywords	harsh environment * diamond * SiC * MEMS * HEMT * laser ablation
Permanent Link	https://hdl.handle.net/11104/0332450

Number of the records: 1