Recent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments

0559035 - FZÚ 2023 RIV SK eng C - Conference Paper (international conference)
Zehetner, J. - Vanko, G. - Dohnal, F. - Izsák, T. - Držík, M. - Kromka, Alexander
Recent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments.
Proceedings of ADEPT - ADEPT 2022. Žilina: University of Žilina, 2022 - (Feiler, M.; Ziman, M.; Kováčová, S.; Kováč, jr., J.), s. 7-12. ISBN 978-80-554-1884-1.
[10th International Conference on Advances in Electronic and Photonic Technologies - ADEPT 2022. Tatranská Lomnica (SK), 20.06.2022-24.06.2022]
R&D Projects: GA MŠMT(CZ) 8X20035
Institutional support: RVO:68378271
Keywords : harsh environment * diamond * SiC * MEMS * HEMT * laser ablation
OECD category: Materials engineering

The properties of SiC and diamond make them attractive materials for MEMS and sensor devices. We innovated specific laser ablation techniques to fabricate membranes and cantilevers made of SiC or nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates by microwave chemical vapour deposition (MWCVD). We started research to generate surface moulds to grow corrugated diamond films for membranes and cantilevers. A software tool was developed to support the design of micromechanical cantilevers. We can measure deformation and resonant frequency of diamond cantilevers and identify the global mechanical properties. A benchmark against finite element simulations enables an inverse identification of the specific system parameters and simplifies the characterization procedure.
Permanent Link: https://hdl.handle.net/11104/0332450