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Recent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments
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SYSNO ASEP 0559035 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Recent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments Author(s) Zehetner, J. (AT)
Vanko, G. (SK)
Dohnal, F. (AT)
Izsák, T. (SK)
Držík, M. (SK)
Kromka, Alexander (FZU-D) RID, ORCID, SAINumber of authors 6 Source Title Proceedings of ADEPT - ADEPT 2022. - Žilina : University of Žilina, 2022 / Feiler M. ; Ziman M. ; Kováčová S. ; Kováč, jr. J. - ISBN 978-80-554-1884-1 Pages s. 7-12 Number of pages 5 s. Publication form Print - P Action 10th International Conference on Advances in Electronic and Photonic Technologies - ADEPT 2022 Event date 20.06.2022 - 24.06.2022 VEvent location Tatranská Lomnica Country SK - Slovakia Event type EUR Language eng - English Country SK - Slovakia Keywords harsh environment ; diamond ; SiC ; MEMS ; HEMT ; laser ablation Subject RIV JB - Sensors, Measurment, Regulation OECD category Materials engineering R&D Projects 8X20035 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support FZU-D - RVO:68378271 Annotation The properties of SiC and diamond make them attractive materials for MEMS and sensor devices. We innovated specific laser ablation techniques to fabricate membranes and cantilevers made of SiC or nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates by microwave chemical vapour deposition (MWCVD). We started research to generate surface moulds to grow corrugated diamond films for membranes and cantilevers. A software tool was developed to support the design of micromechanical cantilevers. We can measure deformation and resonant frequency of diamond cantilevers and identify the global mechanical properties. A benchmark against finite element simulations enables an inverse identification of the specific system parameters and simplifies the characterization procedure. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2023
Number of the records: 1