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Recent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments

  1. 1.
    Zehetner, J. - Vanko, G. - Dohnal, F. - Izsák, T. - Držík, M. - Kromka, Alexander
    Recent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments.
    Proceedings of ADEPT - ADEPT 2022. Žilina: University of Žilina, 2022 - (Feiler, M.; Ziman, M.; Kováčová, S.; Kováč, jr., J.), s. 7-12. ISBN 978-80-554-1884-1.
    [10th International Conference on Advances in Electronic and Photonic Technologies - ADEPT 2022. Tatranská Lomnica (SK), 20.06.2022-24.06.2022]
    OECD category: Materials engineering
    https://hdl.handle.net/11104/0332450
Number of the records: 1  

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