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Recent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments
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$a Recent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments 215 $a 5 s. $c P 463 -1
$1 001 cav_un_epca*0559034 $1 010 $a 978-80-554-1884-1 $1 200 1 $a Proceedings of ADEPT - ADEPT 2022 $v S. 7-12 $1 210 $a Žilina $c University of Žilina $d 2022 $1 702 1 $a Feiler $b M. $4 340 $1 702 1 $a Ziman $b M. $4 340 $1 702 1 $a Kováčová $b S. $4 340 $1 702 1 $a Kováč, jr. $b J. $4 340 610 $a harsh environment 610 $a diamond 610 $a SiC 610 $a MEMS 610 $a HEMT 610 $a laser ablation 700 -1
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$3 cav_un_auth*0100328 $a Kromka $b Alexander $p FZU-D $i Polovodiče $j Semiconductors $w Optical Materials $T Fyzikální ústav AV ČR, v. v. i.
Number of the records: 1