Recent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments

ZEHETNER, J., VANKO, G., DOHNAL, F., IZSÁK, T., DRŽÍK, M., KROMKA, A. Recent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments. In: FEILER, M., ZIMAN, M., KOVÁČOVÁ, S., KOVÁČ, JR., J., eds. Proceedings of ADEPT - ADEPT 2022. Žilina: University of Žilina, 2022, s. 7-12. ISBN 978-80-554-1884-1.