Number of the records: 1  

Plasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution

  1. 1.
    SYSNO0534023
    TitlePlasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution
    Author(s) Pajdarova, A.D. (CZ)
    Kozák, T. (CZ)
    Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
    Čada, Martin (FZU-D) RID, ORCID, SAI
    Mareš, P. (CZ)
    Čapek, J. (CZ)
    Source Title Plasma Sources Science & Technology. Roč. 29, č. 8 (2020), s. 1-11. - : Institute of Physics Publishing
    Article number085016
    Document TypeČlánek v odborném periodiku
    Grant FV30177 GA MPO - Ministry of Industry and Trade (MPO)
    Institutional supportFZU-D - RVO:68378271
    Languageeng
    CountryGB
    Keywords thin-films * HiPIMS * bipolar HiPIMS * positive pulse * plasma diagnostics * magnetron * Langmuir probe diagnostics
    URLhttps://doi.org/10.1088/1361-6595/aba773
    Permanent Linkhttp://hdl.handle.net/11104/0312243
     
Number of the records: 1  

  This site uses cookies to make them easier to browse. Learn more about how we use cookies.