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Plasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution
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SYSNO 0534023 Title Plasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution Author(s) Pajdarova, A.D. (CZ)
Kozák, T. (CZ)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Čada, Martin (FZU-D) RID, ORCID, SAI
Mareš, P. (CZ)
Čapek, J. (CZ)Source Title Plasma Sources Science & Technology. Roč. 29, č. 8 (2020), s. 1-11. - : Institute of Physics Publishing Article number 085016 Document Type Článek v odborném periodiku Grant FV30177 GA MPO - Ministry of Industry and Trade (MPO) Institutional support FZU-D - RVO:68378271 Language eng Country GB Keywords thin-films * HiPIMS * bipolar HiPIMS * positive pulse * plasma diagnostics * magnetron * Langmuir probe diagnostics URL https://doi.org/10.1088/1361-6595/aba773 Permanent Link http://hdl.handle.net/11104/0312243
Number of the records: 1