Plasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution

0534023 - FZÚ 2021 RIV GB eng J - Journal Article
Pajdarova, A.D. - Kozák, T. - Hubička, Zdeněk - Čada, Martin - Mareš, P. - Čapek, J.
Plasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution.
Plasma Sources Science & Technology. Roč. 29, č. 8 (2020), s. 1-11, č. článku 085016. ISSN 0963-0252. E-ISSN 1361-6595
R&D Projects: GA MPO FV30177
Institutional support: RVO:68378271
Keywords : thin-films * HiPIMS * bipolar HiPIMS * positive pulse * plasma diagnostics * magnetron * Langmuir probe diagnostics
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.584, year: 2020
Method of publishing: Limited access
https://doi.org/10.1088/1361-6595/aba773

We have determined the local plasma parameters using the Langmuir probe measurements with a sub-microsecond time resolution during positive voltage pulses of a bipolar high-power impulse magnetron sputtering discharge using an unbalanced magnetron with a titanium target. The effects of the positive voltage pulse amplitude and the delay between the negative voltage pulse end and the positive voltage pulse initiation are investigated as well as the spatial dependence of the plasma parameters at three distances from the target. From the results, the values of the average energy flux of ions during the positive voltage pulse to the substrate are estimated. We have found that the time evolution of the plasma parameters has similar developments which are independent of the positive voltage pulse parameters and the distance from the target, although the values of the plasma parameters are different.
Permanent Link: http://hdl.handle.net/11104/0312243