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Plasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution
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SYSNO ASEP 0534023 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Plasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution Author(s) Pajdarova, A.D. (CZ)
Kozák, T. (CZ)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Čada, Martin (FZU-D) RID, ORCID, SAI
Mareš, P. (CZ)
Čapek, J. (CZ)Number of authors 6 Article number 085016 Source Title Plasma Sources Science & Technology. - : Institute of Physics Publishing - ISSN 0963-0252
Roč. 29, č. 8 (2020), s. 1-11Number of pages 11 s. Language eng - English Country GB - United Kingdom Keywords thin-films ; HiPIMS ; bipolar HiPIMS ; positive pulse ; plasma diagnostics ; magnetron ; Langmuir probe diagnostics Subject RIV BL - Plasma and Gas Discharge Physics OECD category Fluids and plasma physics (including surface physics) R&D Projects FV30177 GA MPO - Ministry of Industry and Trade (MPO) Method of publishing Limited access Institutional support FZU-D - RVO:68378271 UT WOS 000568418000001 EID SCOPUS 85092265900 DOI 10.1088/1361-6595/aba773 Annotation We have determined the local plasma parameters using the Langmuir probe measurements with a sub-microsecond time resolution during positive voltage pulses of a bipolar high-power impulse magnetron sputtering discharge using an unbalanced magnetron with a titanium target. The effects of the positive voltage pulse amplitude and the delay between the negative voltage pulse end and the positive voltage pulse initiation are investigated as well as the spatial dependence of the plasma parameters at three distances from the target. From the results, the values of the average energy flux of ions during the positive voltage pulse to the substrate are estimated. We have found that the time evolution of the plasma parameters has similar developments which are independent of the positive voltage pulse parameters and the distance from the target, although the values of the plasma parameters are different. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2021 Electronic address https://doi.org/10.1088/1361-6595/aba773
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