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Plasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution

  1. 1.
    Pajdarova, A.D. - Kozák, T. - Hubička, Zdeněk - Čada, Martin - Mareš, P. - Čapek, J.
    Plasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution.
    Plasma Sources Science & Technology. Roč. 29, č. 8 (2020), s. 1-11, č. článku 085016. ISSN 0963-0252. E-ISSN 1361-6595
    OECD category: Fluids and plasma physics (including surface physics)
    Impact factor: 3.584, year: 2020
    Method of publishing: Limited access
    https://doi.org/10.1088/1361-6595/aba773
    http://hdl.handle.net/11104/0312243
Number of the records: 1  

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